Annealing and N<sub>2</sub> Plasma Treatment to Minimize Corrosion of SiC-Coated Glass-Ceramics
To improve the chemical durability of SiC-based coatings on glass-ceramics, the effects of annealing and N<sub>2</sub> plasma treatment were investigated. Fluorapatite glass-ceramic disks were coated with SiC via plasma-enhanced chemical vapor deposition (PECVD), treated with N<sub>...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-05-01
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Series: | Materials |
Subjects: | |
Online Access: | https://www.mdpi.com/1996-1944/13/10/2375 |