DLC-Si protective coatings for polycarbonates

• Main Authors: Damasceno J.C., Camargo Jr. S.S., Cremona M.
• Format: Article
• Language: English
• Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2003-01-01
• Series: Materials Research
• Subjects: thin films; DLC; chemical vapor deposition; silicon carbide; polycarbonate
• Online Access: http://www.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392003000100005

In this work, a-C:H:Si (DLC-Si) films were produced onto crystalline silicon and polycarbonate substrates by the rf-PACVD technique from gaseous mixtures of CH4 + SiH4 and C2H2 + SiH4. The effects of self-bias and gas composition upon mechanical and optical properties of the films were investigated. Micro-hardness, residual stress, surface roughness and refractive index measurements were employed for characterization. By incorporating low concentrations of silicon and by exploring the more favorable conditions for the rf-PACVD deposition technique, highly adherent DLC-Si thin films were produced with reduced internal stresses (lower than 1 GPa), high hardness (around 20 GPa) and high deposition rates (up to 10 µm/h). Results that show the technological viability of this material for application as protective coatings for polycarbonates are also discussed.