STUDY OF ADSORPTION PROPERTIES OF NANOSTRUCTURED FILMS BASED ON TIN DIOXIDE
The results of theoretical and experimental studies of surface properties of nanostructured films based on tin dioxide using Fourier-transform infrared spectroscopy, ellipsometry and the indicator method of the distribution of adsorption centers are presented. Etching in inductively coupled plasma w...
Main Authors: | A.P. Sigaev, I.A. Averin, A.A. Karmanov, I.A. Pronin, N.D. Yakushova |
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Format: | Article |
Language: | Russian |
Published: |
Tver State University
2020-12-01
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Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
Subjects: | |
Online Access: | https://physchemaspects.ru/2020/doi-10-26456-pcascnn-2020-12-162/ |
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