STUDY OF ADSORPTION PROPERTIES OF NANOSTRUCTURED FILMS BASED ON TIN DIOXIDE

The results of theoretical and experimental studies of surface properties of nanostructured films based on tin dioxide using Fourier-transform infrared spectroscopy, ellipsometry and the indicator method of the distribution of adsorption centers are presented. Etching in inductively coupled plasma w...

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Bibliographic Details
Main Authors: A.P. Sigaev, I.A. Averin, A.A. Karmanov, I.A. Pronin, N.D. Yakushova
Format: Article
Language:Russian
Published: Tver State University 2020-12-01
Series:Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
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Online Access:https://physchemaspects.ru/2020/doi-10-26456-pcascnn-2020-12-162/
Description
Summary:The results of theoretical and experimental studies of surface properties of nanostructured films based on tin dioxide using Fourier-transform infrared spectroscopy, ellipsometry and the indicator method of the distribution of adsorption centers are presented. Etching in inductively coupled plasma was used for additional post-processing of nanostructured films in order to activate the adsorption centers.
ISSN:2226-4442
2658-4360