A systematic MEMS sensor calibration framework

In this paper we present a systematic method to determine sets of close to optimal sensor calibration points for a polynomial approximation. <br><br> For each set of calibration points a polynomial is used to fit the nonlinear sensor response to the calibration reference. The polynomial...

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Bibliographic Details
Main Authors: A. Dickow, G. Feiertag
Format: Article
Language:English
Published: Copernicus Publications 2015-02-01
Series:Journal of Sensors and Sensor Systems
Online Access:http://www.j-sens-sens-syst.net/4/97/2015/jsss-4-97-2015.pdf