Gas Permeation Property of Silicon Carbide Membranes Synthesized by Counter-Diffusion Chemical Vapor Deposition

Gas Permeation Property of Silicon Carbide Membranes Synthesized by Counter-Diffusion Chemical Vapor Deposition

An amorphous silicon carbide (SiC) membrane was synthesized by counter-diffusion chemical vapor deposition (CDCVD) using silacyclobutane (SCB) at 788 K. The SiC membrane on a Ni-&#947;-alumina (Al<sub>2</sub>O<sub>3</sub>) &#945;-coated Al<sub>2</sub>O<...

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Bibliographic Details
Main Authors: Takayuki Nagano, Koji Sato, Koichi Kawahara
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Membranes
Subjects:
hydrogen
amorphous
silicon carbide
alumina
chemical vapor deposition
Online Access:https://www.mdpi.com/2077-0375/10/1/11

Internet

https://www.mdpi.com/2077-0375/10/1/11

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