Imaging Scatterometry with Extrapolation of Missing BRDF Data for Materials Used in Laser Material Processing
Imaging scatterometry is a method for determining the reflection distribution based on bidirectional reflectance distribution function (BRDF) measurements. However, it has a well-known limitation that results obtained by imaging scatterometry for small illumination angles are practically useless. Th...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/1/8 |