Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array

Design of a High-Performance Micro Integrated Surface Plasmon Resonance Sensor Based on Silicon-On-Insulator Rib Waveguide Array

Based on silicon-on-insulator (SOI) rib waveguide with large cross-section, a micro integrated surface plasmon resonance (SPR) biochemical sensor platform is proposed. SPR is excited at the deeply etched facet of the bend waveguide by the guiding mode and a bimetallic configuration is employed. With...

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Bibliographic Details
Main Authors: Dengpeng Yuan, Ying Dong, Yujin Liu, Tianjian Li
Format: Article
Language:English
Published: MDPI AG 2015-07-01
Series:Sensors
Subjects:
surface plasmon resonance (SPR)
silicon-on-insulator (SOI)
biochemical sensor
rib waveguide
finite-difference time-domain (FDTD) method
Online Access:http://www.mdpi.com/1424-8220/15/7/17313

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