The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator

The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator

Many researchers have studied the miniaturization of the hemisphere resonator gyroscope for decades. The hemisphere resonator (HSR), as the core component, has a size that has been reduced to the submillimeter level. We developed a method of batch production of micro-hemisphere shell resonators base...

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Bibliographic Details
Main Authors: Jianbing Xie, Lei Chen, Hui Xie, Jinqiu Zhou, Guangcheng Liu
Format: Article
Language:English
Published: MDPI AG 2018-01-01
Series:Micromachines
Subjects:
hemisphere resonator gyroscope
hemisphere resonator
chemical foaming process
glassblowing
hemisphere shell
hollow glass microsphere
micro electro mechanical systems (MEMS)
Online Access:http://www.mdpi.com/2072-666X/9/2/42

Internet

http://www.mdpi.com/2072-666X/9/2/42

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