Observer-based controller design for a vibration isolation stage having hybrid electromagnets
Vibration isolation systems based on hybrid electromagnets, consisting of electromagnet and permanent magnet, have a potential usage in many industrial areas, such as clean room design, transportation, semiconductor manufacturing, suspension systems, and robotic surgery due to providing mechanical c...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2018-12-01
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| Series: | Journal of Low Frequency Noise, Vibration and Active Control |
| Online Access: | https://doi.org/10.1177/1461348418782170 |