A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual re...

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Bibliographic Details
Main Authors: Agin Vyas, Henrik Staaf, Cristina Rusu, Thorbjörn Ebefors, Jessica Liljeholm, Anderson D. Smith, Per Lundgren, Peter Enoksson
Format: Article
Language:English
Published: MDPI AG 2018-05-01
Series:Micromachines
Subjects:
piezoelectric micro-energy harvester
lead zirconate titanate
bandwidth broadening
coupled cantilevers
enhanced stress distribution
finite element modeling
microelectromechanical systems (MEMS)
Online Access:http://www.mdpi.com/2072-666X/9/5/252
Description
Summary:This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.
ISSN:2072-666X

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