Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels
We propose a concept of a flexible sensor array using a novel capacitive force sensor not having a vulnerable electrode on the force applied site. It has a polymer domed structure inside which silicone oil is contained. When the force is applied, the oil is pushed into the surrounding thin channels,...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2012-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/3/2/270/ |