Young’s modulus of multi-layer microcantilevers

Young’s modulus of multi-layer microcantilevers

A theoretical model for calculating the Young’s modulus of multi-layer microcantilevers with a coating is proposed, and validated by a three-dimensional (3D) finite element (FE) model using ANSYS parametric design language (APDL) and atomic force microscopy (AFM) characterization. Compared with typi...

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Bibliographic Details
Main Authors: Zhikang Deng, Jinglan Deng, Liang He, Rongshu Zhuo, Ruiqi Zhu, Yang Shi, Hui Liu, Wei Yang, Hui Yuan, Yiming Chen, Yue Huang, Yi Zheng
Format: Article
Language:English
Published: AIP Publishing LLC 2017-12-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.5011212

Internet

http://dx.doi.org/10.1063/1.5011212

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