Influence of Magnetic Field on Vacuum Arc Discharge Volt-Ampere Characteristics

Influence of Magnetic Field on Vacuum Arc Discharge Volt-Ampere Characteristics

<p>The vacuum arc evaporation technology was developed in the 70-s in the USSR and widely used nowadays for deposition of various functional coatings. Magnetic field provides stabilization of the discharge and cathode spot movement in arc evaporators. Usually, are used two types of magnetic sy...

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Bibliographic Details
Main Authors: D. V. Duhopel'nikov, D. V. Kirillov
Format: Article
Language:Russian
Published: MGTU im. N.È. Baumana 2015-01-01
Series:Nauka i Obrazovanie
Subjects:
cathodic arc
vacuum arc
voltage
volt-ampere characteristic
magnetic field
plasma
Online Access:http://technomag.edu.ru/jour/article/view/109

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