Influence of Magnetic Field on Vacuum Arc Discharge Volt-Ampere Characteristics
<p>The vacuum arc evaporation technology was developed in the 70-s in the USSR and widely used nowadays for deposition of various functional coatings. Magnetic field provides stabilization of the discharge and cathode spot movement in arc evaporators. Usually, are used two types of magnetic sy...
Main Authors: | , |
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Format: | Article |
Language: | Russian |
Published: |
MGTU im. N.È. Baumana
2015-01-01
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Series: | Nauka i Obrazovanie |
Subjects: | |
Online Access: | http://technomag.edu.ru/jour/article/view/109 |