Novel Designs for Application Specific MEMS Pressure Sensors

Novel Designs for Application Specific MEMS Pressure Sensors

In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and hig...

Full description

Bibliographic Details
Main Authors: Erik V. Thomsen, Lasse Lorenzen, Giulio Fragiacomo, Kasper Reck
Format: Article
Language:English
Published: MDPI AG 2010-10-01
Series:Sensors
Subjects:
micromachined
pressure
capacitive
optical
wireless
silicon
MEMS
MOEMS
Online Access:http://www.mdpi.com/1424-8220/10/11/9541/

Internet

http://www.mdpi.com/1424-8220/10/11/9541/

Similar Items