Slot Waveguides With Silicon-Rich Materials for Nonlinear Applications
Slot waveguides based on silicon-rich materials are proposed and experimentally demonstrated, which consist of a silicon-rich oxide (SRO) slot layer sandwiched by two silicon-rich nitride (SRN) layers. Measurements show the waveguides have a low propagation loss of <inline-formula><tex-math...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2021-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9399784/ |