Slot Waveguides With Silicon-Rich Materials for Nonlinear Applications

Slot waveguides based on silicon-rich materials are proposed and experimentally demonstrated, which consist of a silicon-rich oxide (SRO) slot layer sandwiched by two silicon-rich nitride (SRN) layers. Measurements show the waveguides have a low propagation loss of <inline-formula><tex-math...

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Bibliographic Details
Main Authors: Meicheng Fu, Xiaoyan Wang, Wenjun Yi, Xiujian Li, Lars Frandsen, Xiaowei Guan
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9399784/