Medical Cyclotron Solid Target Preparation by Ultrathick Film Magnetron Sputtering Deposition
Magnetron sputtering is proposed here as an innovative method for the deposition of a material layer onto an appropriate backing plate for cyclotron solid targets aimed at medical radioisotopes production. In this study, a method to deposit thick, high-density, high-thickness-uniformity, and stress-...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-03-01
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Series: | Instruments |
Subjects: | |
Online Access: | http://www.mdpi.com/2410-390X/3/1/21 |