Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficie...

Full description

Bibliographic Details
Main Authors:	Imrich Gablech, Jaroslav Klempa, Jan Pekárek, Petr Vyroubal, Jan Hrabina, Miroslava Holá, Jan Kunz, Jan Brodský, Pavel Neužil
Format:	Article
Language:	English
Published:	MDPI AG 2020-01-01
Series:	Micromachines
Subjects:	aln micro-electro-mechanical systems (mems) cantilever complementary metal oxide semiconductor (cmos) compatible energy harvesting high performance
Online Access:	https://www.mdpi.com/2072-666X/11/2/143

Similar Items

Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application
by: B. Abdul, et al.
Published: (2020-06-01)

Infinite Selectivity of Wet SiO<sub>2</sub> Etching in Respect to Al
by: Imrich Gablech, et al.
Published: (2020-03-01)

Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
by: Martin Fischeneder, et al.
Published: (2017-08-01)

Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications
by: Ivan Zamora, et al.
Published: (2020-01-01)

Heterogeneous Integration of AlN MEMS Contour-Mode Resonators and CMOS Circuits
by: Calayir, Enes
Published: (2017)

CMOS MEMS Fabrication Technologies and Devices
by: Hongwei Qu
Published: (2016-01-01)

A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors
by: Víctor Ruiz-Díez, et al.
Published: (2019-02-01)

Enhancement of Frequency Stability Using Synchronization of a Cantilever Array for MEMS-Based Sensors
by: Francesc Torres, et al.
Published: (2016-10-01)

A New Method for 2D Materials Properties Modulation by Controlled Induced Mechanical Strain
by: Imrich Gablech, et al.
Published: (2018-12-01)

Theoretical and Experimental Studies on MEMS Variable Cross-Section Cantilever Beam Based Piezoelectric Vibration Energy Harvester
by: Xianming He, et al.
Published: (2021-06-01)

Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
by: Jian Yang, et al.
Published: (2018-02-01)

Tuneable Q-Factor of MEMS Cantilevers with Integrated Piezoelectric Thin Films
by: Martin Fischeneder, et al.
Published: (2018-11-01)

Towards the Monolithic Integration of Converter Circuitry and Piezoelectric MEMS Energy Harvesters
by: Marcos Duque, et al.
Published: (2018-12-01)

Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems
by: Makoto Ishida, et al.
Published: (2007-07-01)

Sensitivity and Directivity Analysis of Piezoelectric Ultrasonic CantileverBased MEMS Hydrophone for Underwater Applications
by: Basit Abdul, et al.
Published: (2020-10-01)

Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate
by: Sitao Fei, et al.
Published: (2021-01-01)

Optimization of a Piezoelectric Energy Harvester and Design of a Charge Pump Converter for CMOS-MEMS Monolithic Integration
by: Marcos Duque, et al.
Published: (2019-04-01)

Modeling of a square-shape ZnO, ZnS and AlN membrane for mems capacitive pressure-sensor applications
by: Dagamseh Ahmad, et al.
Published: (2020-01-01)

Design and Fabrication of a Novel MEMS Relay with Low Actuation Voltage
by: Hao Li, et al.
Published: (2020-02-01)

Thermodynamical consideration of the synthesis of solid AlN from thermal plasma
by: Radić-Perić Jelena, et al.
Published: (2001-01-01)

Étude d’un résonateur piézoélectrique à ondes acoustiques de volume en technologie film mince
by: Mareschal, Olivier
Published: (2011)

Modeling and Optimization of Directly Modulated Piezoelectric Micromachined Ultrasonic Transducers
by: Flavius Pop, et al.
Published: (2021-12-01)

A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure
by: Che-Ming Chiang, et al.
Published: (2007-10-01)

Optimization of Contact Force and Pull-in Voltage for Series based MEMS Switch
by: Abhijeet KSHIRSAGAR, et al.
Published: (2010-04-01)

Growth and investigation of TiO2 and AlN nanostructure’s properties
by: A. Bahari, et al.
Published: (2008-03-01)

Thermodynamical consideration of the synthesis of solid AlN from thermal plasma
by: NIKOLA PEKAS, et al.
Published: (2001-08-01)

Features of the receiving of piezoelectric thin films by plasma spraying of powdery AlN
by: V. S. Feshchenko, et al.
Published: (2020-03-01)

Nanochip: a MEMS-Based Ultra-High Data Density Memory Device
by: Nickolai BELOV, et al.
Published: (2009-10-01)

Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates
by: Víctor Ruiz-Díez, et al.
Published: (2020-05-01)

Theoretical Modeling of Piezoelectric Cantilever MEMS Loudspeakers
by: Wei Liu, et al.
Published: (2021-07-01)

Spiral-Shaped Piezoelectric MEMS Cantilever Array for Fully Implantable Hearing Systems
by: Péter Udvardi, et al.
Published: (2017-10-01)

Improved Sensitivity MEMS Cantilever Sensor for Terahertz Photoacoustic Spectroscopy
by: Ronald A. Coutu, et al.
Published: (2016-02-01)

Properties of AlN thin films deposited by means of magnetron sputtering for ISFET applications
by: Firek Piotr, et al.
Published: (2015-12-01)

A Novel Tri-Axial Piezoelectric MEMS Accelerometer with Folded Beams
by: Yan Liu, et al.
Published: (2021-01-01)

Simultaneous tropical disease identification with PZT-5H piezoelectric material including molecular mass biosensor microcantilever collection
by: Miranji Katta, et al.
Published: (2021-06-01)

MOVPE Growth of AlN and AlGaN/AlN Quantum Wells and their Optical Polarization Properties
by: BANAL, RYAN GANIPAN
Published: (2009)

A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
by: Jian Yang, et al.
Published: (2019-09-01)

Using the Nonlinear Duffing Effect of Piezoelectric Micro-Oscillators for Wide-Range Pressure Sensing
by: Tobias Zengerle, et al.
Published: (2021-07-01)

Fabrication of AlN-Based Flexible Piezoelectric Pressure Sensor to Integrate into an Artificial Pancreas
by: Maria Assunta Signore, et al.
Published: (2018-11-01)

Efficient and cost-effective method to synthesize highly purified Ti4AlN3 and Ti2AlN
by: Muhammad Faraz Ud Din, et al.
Published: (2019-02-01)