Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

In this work, we demonstrate the simple fabrication process of AlN-based piezoelectric energy harvesters (PEH), which are made of cantilevers consisting of a multilayer ion beam-assisted deposition. The preferentially (001) orientated AlN thin films possess exceptionally high piezoelectric coefficie...

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Bibliographic Details
Main Authors: Imrich Gablech, Jaroslav Klempa, Jan Pekárek, Petr Vyroubal, Jan Hrabina, Miroslava Holá, Jan Kunz, Jan Brodský, Pavel Neužil
Format: Article
Language:English
Published: MDPI AG 2020-01-01
Series:Micromachines
Subjects:
aln
micro-electro-mechanical systems (mems) cantilever
complementary metal oxide semiconductor (cmos) compatible
energy harvesting
high performance
Online Access:https://www.mdpi.com/2072-666X/11/2/143

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https://www.mdpi.com/2072-666X/11/2/143

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