Effect of magnetic field on double layer in argon helicon plasma

Abstract The electric double layer in argon helicon plasma by using floating electrostatic probe and local optical emission spectroscopy under different external magnetic field was investigated. Results show that electrons generated in the plasma source can be magnetized by the magnetic field and tr...

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Bibliographic Details
Main Authors: Kaiyi Yang, Ruilin Cui, Wanying Zhu, Zhiwen Wu, Jiting Ouyang
Format: Article
Language:English
Published: Wiley 2021-04-01
Series:High Voltage
Online Access:https://doi.org/10.1049/hve2.12018
Description
Summary:Abstract The electric double layer in argon helicon plasma by using floating electrostatic probe and local optical emission spectroscopy under different external magnetic field was investigated. Results show that electrons generated in the plasma source can be magnetized by the magnetic field and transported by the gradient of diverging magnetic field in the diffusion chamber, giving rise to the hollowed distribution of electron temperature. The electron temperature on axis has a sudden decrease, leading to the sudden decrease of plasma density as well as the plasma potential, forming a double layer structure. The position of double layer moves along with the position of diverging magnetic field, and the potential drop increases along with the strength of magnetic field. The structure of the external magnetic field plays the decisive factor for the double layer in helicon plasma.
ISSN:2397-7264