Long-term stability of transparent n/p ZnO homojunctions grown by rf-sputtering at room-temperature
ZnO-based n/p homojunctions were fabricated by sputtering from a single zinc nitride target at room temperature on metal or ITO-coated glass and Si substrates. A multi-target rf-sputtering system was used for the growth of all oxide films as multilayers in a single growth run without breaking the va...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2019-09-01
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Series: | Journal of Materiomics |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2352847818301898 |