Fractal Nanotechnology
<p>Abstract</p> <p>Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 10<sup>2</sup>–10<sup>5</sup> nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2008-01-01
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Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://dx.doi.org/10.1007/s11671-008-9170-0 |
Summary: | <p>Abstract</p> <p>Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 10<sup>2</sup>–10<sup>5</sup> nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterning technology, in this way permitting the controlled preparation of fractal surfaces.</p> |
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ISSN: | 1931-7573 1556-276X |