Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications

Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications

In this paper, the piezoelectric coefficient d33 of AlN thin films for MEMS applications was studied by the piezoresponse force microscopy (PFM) measurement and finite element method (FEM) simulation. Both the sample without a top electrode and another with a top electrode were measured by PFM to ch...

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Bibliographic Details
Main Authors: Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning
Format: Article
Language:English
Published: MDPI AG 2015-09-01
Series:Micromachines
Subjects:
aluminum nitride
MEMS
finite element method
piezoresponse force microscopy
piezoelectric coefficient
Online Access:http://www.mdpi.com/2072-666X/6/9/1236

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