Tantalum-Doped TiO<sub>2</sub> Prepared by Atomic Layer Deposition and Its Application in Perovskite Solar Cells

Tantalum-Doped TiO<sub>2</sub> Prepared by Atomic Layer Deposition and Its Application in Perovskite Solar Cells

Tantalum (Ta)-doped titanium oxide (TiO<sub>2</sub>) thin films are grown by plasma enhanced atomic layer deposition (PEALD), and used as both an electron transport layer and hole blocking compact layer of perovskite solar cells. The metal precursors of tantalum ethoxide and titanium iso...

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Bibliographic Details
Main Authors:	Chia-Hsun Hsu, Ka-Te Chen, Ling-Yan Lin, Wan-Yu Wu, Lu-Sheng Liang, Peng Gao, Yu Qiu, Xiao-Ying Zhang, Pao-Hsun Huang, Shui-Yang Lien, Wen-Zhang Zhu
Format:	Article
Language:	English
Published:	MDPI AG 2021-06-01
Series:	Nanomaterials
Subjects:	tantalum titanium oxide atomic layer deposition bubbler temperature perovskite solar cell electron transport layer
Online Access:	https://www.mdpi.com/2079-4991/11/6/1504

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