Low-Cost PVD Shadow Masks with Submillimeter Resolution from Laser-Cut Paper

Low-Cost PVD Shadow Masks with Submillimeter Resolution from Laser-Cut Paper

We characterize an affordable method of producing stencils for submillimeter physical vapor deposition (PVD) by using paper and a benchtop laser cutter. Patterning electrodes or similar features on top of organic or biological substrates is generally not possible using standard photolithography. Sha...

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Bibliographic Details
Main Authors: Farzad Elhami Nik, Isabelle Matthiesen, Anna Herland, Thomas E. Winkler
Format: Article
Language:English
Published: MDPI AG 2020-07-01
Series:Micromachines
Subjects:
shadow mask
stencil lithography
CO<sub>2</sub> laser
paper
metal deposition
Online Access:https://www.mdpi.com/2072-666X/11/7/676

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https://www.mdpi.com/2072-666X/11/7/676

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