Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas

Bibliographic Details
Main Author:	Tong Lizhu
Format:	Article
Language:	English
Published:	De Gruyter 2012-08-01
Series:	Open Physics
Subjects:	icp plasma gas composition gas flow rate coupled calculation
Online Access:	https://doi.org/10.2478/s11534-012-0034-y

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record_format	Article
spelling	doaj-24ce8951d5404ad782246628315fa4f72021-09-05T14:01:40ZengDe GruyterOpen Physics2391-54712012-08-0110488889710.2478/s11534-012-0034-yNumerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmasTong Lizhu0Keisoku Engineering System Co., Ltd., 1-9-5 Uchikanda, Chiyoda-ku, Tokyo, 101-0047, Japanhttps://doi.org/10.2478/s11534-012-0034-yicp plasmagas compositiongas flow ratecoupled calculation
collection	DOAJ
language	English
format	Article
sources	DOAJ
author	Tong Lizhu
spellingShingle	Tong Lizhu Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas Open Physics icp plasma gas composition gas flow rate coupled calculation
author_facet	Tong Lizhu
author_sort	Tong Lizhu
title	Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas
title_short	Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas
title_full	Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas
title_fullStr	Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas
title_full_unstemmed	Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas
title_sort	numerical study of the effect of gas flow in low pressure inductively coupled ar/n2 plasmas
publisher	De Gruyter
series	Open Physics
issn	2391-5471
publishDate	2012-08-01
topic	icp plasma gas composition gas flow rate coupled calculation
url	https://doi.org/10.2478/s11534-012-0034-y
work_keys_str_mv	AT tonglizhu numericalstudyoftheeffectofgasflowinlowpressureinductivelycoupledarn2plasmas
_version_	1717809751900815360

Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas

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