Numerical study of the effect of gas flow in low pressure inductively coupled Ar/N2 plasmas
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| Format: | Article |
| Language: | English |
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De Gruyter
2012-08-01
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| Series: | Open Physics |
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| Online Access: | https://doi.org/10.2478/s11534-012-0034-y |
| ISSN: | 2391-5471 |
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