Tracking Control of PZT-Driven Compliant Precision Positioning Micromanipulator
This paper focuses on improving tracking performance of totally uncoupled compliant micromanipulator based on robust control method of elliptical hysteresis model. The hysteresis model and hysteresis compensation model for proposed mechanism based on Piezoelectric transducer (PZT) are established by...
Main Authors: | , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
IEEE
2020-01-01
|
Series: | IEEE Access |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9136671/ |