Energetic condensation growth of Nb thin films

Energetic condensation growth of Nb thin films

This paper describes energetic condensation growth of Nb films using a cathodic arc plasma, whose 60–120 eV ions penetrate a few monolayers into the substrate and enable sufficient surface mobility to ensure that the lowest energy state (crystalline structure with minimal defects) is accessible to t...

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Bibliographic Details
Main Authors:	M. Krishnan, E. Valderrama, C. James, X. Zhao, J. Spradlin, A-M Valente Feliciano, L. Phillips, C. E. Reece, K. Seo, Z. H. Sung
Format:	Article
Language:	English
Published:	American Physical Society 2012-03-01
Series:	Physical Review Special Topics. Accelerators and Beams
Online Access:	http://doi.org/10.1103/PhysRevSTAB.15.032001

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