Energetic condensation growth of Nb thin films
This paper describes energetic condensation growth of Nb films using a cathodic arc plasma, whose 60–120 eV ions penetrate a few monolayers into the substrate and enable sufficient surface mobility to ensure that the lowest energy state (crystalline structure with minimal defects) is accessible to t...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Physical Society
2012-03-01
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| Series: | Physical Review Special Topics. Accelerators and Beams |
| Online Access: | http://doi.org/10.1103/PhysRevSTAB.15.032001 |