MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure
We demonstrate a compact electromagnetic power sensor based on force effects of electromagnetic radiation onto a highly reflective mirror surface. Unlike the conventional power measurement approach, the photons are not absorbed and can be further used in the investigated system. In addition, the exe...
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MDPI AG
2018-12-01
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| Series: | Proceedings |
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| Online Access: | http://www.mdpi.com/2504-3900/2/13/767 |
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doaj-2270de6a820e43c1b728ae2d6fe866ae2020-11-24T21:33:18ZengMDPI AGProceedings2504-39002018-12-0121376710.3390/proceedings2130767proceedings2130767MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation PressureIvan Ryger0Alexandra Artusio-Glimpse1Paul Williams2Gordon Shaw3Matthew Simons4Christopher Holloway5John Lehman6Associate of the National Institute of Standards and Technology, Boulder, CO 80305, USANational Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USANational Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USANational Institute of Standards and Technology, 100 Bureau Dr, Gaithersburg, MD 20899, USANational Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USANational Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USANational Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USAWe demonstrate a compact electromagnetic power sensor based on force effects of electromagnetic radiation onto a highly reflective mirror surface. Unlike the conventional power measurement approach, the photons are not absorbed and can be further used in the investigated system. In addition, the exerted force is frequency-independent, yielding a wide measurement frequency span being practically limited by the wavelength-dependent mirror reflection coefficient. The mechanical arrangement of two sensing elements in tandem suppresses the influence of gravity and vibrations on the power reading. We achieve a noise floor of about 1 W/√Hz and speed of 100 ms, being practically limited by sensor’s dynamics and lock-in amplifier filter settling time.http://www.mdpi.com/2504-3900/2/13/767radiation pressurecapacitive sensorlock-in amplifiersilicon micromachiningacoustic noise suppressiontilt immunitydistributed bragg reflectorArchimedian spiral spring |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Ivan Ryger Alexandra Artusio-Glimpse Paul Williams Gordon Shaw Matthew Simons Christopher Holloway John Lehman |
| spellingShingle |
Ivan Ryger Alexandra Artusio-Glimpse Paul Williams Gordon Shaw Matthew Simons Christopher Holloway John Lehman MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure Proceedings radiation pressure capacitive sensor lock-in amplifier silicon micromachining acoustic noise suppression tilt immunity distributed bragg reflector Archimedian spiral spring |
| author_facet |
Ivan Ryger Alexandra Artusio-Glimpse Paul Williams Gordon Shaw Matthew Simons Christopher Holloway John Lehman |
| author_sort |
Ivan Ryger |
| title |
MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure |
| title_short |
MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure |
| title_full |
MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure |
| title_fullStr |
MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure |
| title_full_unstemmed |
MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure |
| title_sort |
mems non-absorbing electromagnetic power sensor employing the effect of radiation pressure |
| publisher |
MDPI AG |
| series |
Proceedings |
| issn |
2504-3900 |
| publishDate |
2018-12-01 |
| description |
We demonstrate a compact electromagnetic power sensor based on force effects of electromagnetic radiation onto a highly reflective mirror surface. Unlike the conventional power measurement approach, the photons are not absorbed and can be further used in the investigated system. In addition, the exerted force is frequency-independent, yielding a wide measurement frequency span being practically limited by the wavelength-dependent mirror reflection coefficient. The mechanical arrangement of two sensing elements in tandem suppresses the influence of gravity and vibrations on the power reading. We achieve a noise floor of about 1 W/√Hz and speed of 100 ms, being practically limited by sensor’s dynamics and lock-in amplifier filter settling time. |
| topic |
radiation pressure capacitive sensor lock-in amplifier silicon micromachining acoustic noise suppression tilt immunity distributed bragg reflector Archimedian spiral spring |
| url |
http://www.mdpi.com/2504-3900/2/13/767 |
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