Heterogeneous optoelectronic characteristics of Si micropillar arrays fabricated by metal-assisted chemical etching
Abstract Recent progress achieved in metal-assisted chemical etching (MACE) has enabled the production of high-quality micropillar arrays for various optoelectronic applications. Si micropillars produced by MACE often show a porous Si/SiO x shell on crystalline pillar cores introduced by local elect...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2020-10-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-020-73445-x |