A Test Setup for the Characterization of Lorentz-Force MEMS Magnetometers
Lorentz-force MEMS magnetometers are interesting candidates for the replacement of magnetometers in consumer electronics products. Plenty of works in the literature propose MEMS magnetometers, their readout circuits and modulations. However, during the standalone characterization of such MEMS device...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2021-01-01
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| Series: | IEEE Open Journal of Circuits and Systems |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9536262/ |