Mo-La<sub>2</sub>O<sub>3</sub> Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

Mo-La<sub>2</sub>O<sub>3</sub> Multilayer Metallization Systems for High Temperature Surface Acoustic Wave Sensor Devices

Developing advanced thin film materials is the key challenge in high-temperature applications of surface acoustic wave sensor devices. One hundred nanometer thick (Mo-La<inline-formula> <math display="inline"> <semantics> <msub> <mrow></mrow> <mn>2...

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Bibliographic Details
Main Authors: Siegfried B. Menzel, Marietta Seifert, Abhinav Priyadarshi, Gayatri K. Rane, Eunmi Park, Steffen Oswald, Thomas Gemming
Format: Article
Language:English
Published: MDPI AG 2019-08-01
Series:Materials
Subjects:
SAW sensors
interdigital transducer material
high-temperature stability
dispersion strengthening
Mo-La<sub>2</sub>O<sub>3</sub> multilayers
Online Access:https://www.mdpi.com/1996-1944/12/17/2651

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https://www.mdpi.com/1996-1944/12/17/2651

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