Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resona...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Hindawi-Wiley
2018-01-01
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| Series: | Scanning |
| Online Access: | http://dx.doi.org/10.1155/2018/7606037 |