Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode

Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode

This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resona...

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Main Authors: Lu Liu, Jianguo Xu, Rui Zhang, Sen Wu, Xiaodong Hu, Xiaotang Hu
Format: Article
Language:English
Published: Hindawi-Wiley 2018-01-01
Series:Scanning
Online Access:http://dx.doi.org/10.1155/2018/7606037
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spelling doaj-1e967771171d434baa4f78fc275a16f32020-11-25T00:18:33ZengHindawi-WileyScanning0161-04571932-87452018-01-01201810.1155/2018/76060377606037Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance ModeLu Liu0Jianguo Xu1Rui Zhang2Sen Wu3Xiaodong Hu4Xiaotang Hu5State Key Laboratory of Precision Measurement Technology & Instruments, Tianjin University, Tianjin 300072, ChinaState Key Laboratory of Precision Measurement Technology & Instruments, Tianjin University, Tianjin 300072, ChinaState Key Laboratory of Precision Measurement Technology & Instruments, Tianjin University, Tianjin 300072, ChinaState Key Laboratory of Precision Measurement Technology & Instruments, Tianjin University, Tianjin 300072, ChinaState Key Laboratory of Precision Measurement Technology & Instruments, Tianjin University, Tianjin 300072, ChinaState Key Laboratory of Precision Measurement Technology & Instruments, Tianjin University, Tianjin 300072, ChinaThis article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resonance frequency. The vertical resonance mode was used for upper surface imaging, and the torsional resonance mode was used for sidewall detecting. The 3D-AFM was applied to measure standard gratings with the height of 100 nm and 200 nm. The experiment results showed that the presented 3D-AFM technique was able to detect the small defect features on the steep sidewall and to reconstruct the 3D topography of the measured structure.http://dx.doi.org/10.1155/2018/7606037
collection DOAJ
language English
format Article
sources DOAJ
author Lu Liu
Jianguo Xu
Rui Zhang
Sen Wu
Xiaodong Hu
Xiaotang Hu
spellingShingle Lu Liu
Jianguo Xu
Rui Zhang
Sen Wu
Xiaodong Hu
Xiaotang Hu
Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
Scanning
author_facet Lu Liu
Jianguo Xu
Rui Zhang
Sen Wu
Xiaodong Hu
Xiaotang Hu
author_sort Lu Liu
title Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
title_short Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
title_full Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
title_fullStr Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
title_full_unstemmed Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
title_sort three-dimensional atomic force microscopy for sidewall imaging using torsional resonance mode
publisher Hindawi-Wiley
series Scanning
issn 0161-0457
1932-8745
publishDate 2018-01-01
description This article presents an atomic force microscopy (AFM) technique for true three-dimensional (3D) characterization. The cantilever probe with flared tip was used in a home-made 3D-AFM system. The cantilever was driven by two shaking piezoceramics and oscillated around its vertical or torsional resonance frequency. The vertical resonance mode was used for upper surface imaging, and the torsional resonance mode was used for sidewall detecting. The 3D-AFM was applied to measure standard gratings with the height of 100 nm and 200 nm. The experiment results showed that the presented 3D-AFM technique was able to detect the small defect features on the steep sidewall and to reconstruct the 3D topography of the measured structure.
url http://dx.doi.org/10.1155/2018/7606037
work_keys_str_mv AT luliu threedimensionalatomicforcemicroscopyforsidewallimagingusingtorsionalresonancemode
AT jianguoxu threedimensionalatomicforcemicroscopyforsidewallimagingusingtorsionalresonancemode
AT ruizhang threedimensionalatomicforcemicroscopyforsidewallimagingusingtorsionalresonancemode
AT senwu threedimensionalatomicforcemicroscopyforsidewallimagingusingtorsionalresonancemode
AT xiaodonghu threedimensionalatomicforcemicroscopyforsidewallimagingusingtorsionalresonancemode
AT xiaotanghu threedimensionalatomicforcemicroscopyforsidewallimagingusingtorsionalresonancemode
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