Vibration Mode Investigation of Piezoelectric Ultrasonic Microsensors on Buckled Diaphragms
Vibration mode of piezoelectric ultrasonic microsensors was investigated on buckled diaphragm structures from the viewpoint of higher order vibration modes than the fundamental one. Several vibration modes were generated on the diaphragms as the response to an ultrasound pulse, and their natural fre...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-12-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/2/13/835 |