Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

Two-Dimensional Micro-/Nanoradian Angle Generator with High Resolution and Repeatability Based on Piezo-Driven Double-Axis Flexure Hinge and Three Capacitive Sensors

This study presents a two-dimensional micro-/nanoradian angle generator (2D-MNAG) that achieves high angular displacement resolution and repeatability using a piezo-driven flexure hinge for two-dimensional deflections and three capacitive sensors for output angle monitoring and feedback control. The...

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Bibliographic Details
Main Authors: Xinran Tan, Fan Zhu, Chao Wang, Yang Yu, Jian Shi, Xue Qi, Feng Yuan, Jiubin Tan
Format: Article
Language:English
Published: MDPI AG 2017-11-01
Series:Sensors
Subjects:
angle generator
angular deflection
angle calibration
flexure hinge
capacitive sensor
Monte Carlo method
Online Access:https://www.mdpi.com/1424-8220/17/11/2672

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