Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing

Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing

Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. The thin films were grown using capacitively coupled plasma enhanced chemical vapor deposition and a technological workflow for the transfer of the active material onto flexible substrates was est...

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Main Authors: Simionescu Octavian-Gabriel, Pachiu Cristina, Ionescu Octavian, Dumbrăvescu Niculae, Buiu Octavian, Popa Radu Cristian, Avram Andrei, Dinescu Gheorghe
Format: Article
Language:English
Published: De Gruyter 2020-07-01
Series:Reviews on Advanced Materials Science
Subjects:
flexible sensors
film transfer
gauge factor
Online Access:https://doi.org/10.1515/rams-2020-0031
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spelling doaj-1cab7a8664fe4b11affbdf5be6be9c872021-09-05T14:00:08ZengDe GruyterReviews on Advanced Materials Science1605-81272020-07-0159130631310.1515/rams-2020-0031rams-2020-0031Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensingSimionescu Octavian-Gabriel0Pachiu Cristina1Ionescu Octavian2Dumbrăvescu Niculae3Buiu Octavian4Popa Radu Cristian5Avram Andrei6Dinescu Gheorghe7National Institute for Research and Development in Microtechnologies -IMT Bucharest, 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190, Romania; Faculty of Physics, University of Bucharest, 405 Atomistilor Street, Magurele city, Ilfov county, 077125, RomaniaNational Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190, RomaniaNational Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190, RomaniaNational Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190, RomaniaNational Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190, RomaniaNational Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190, RomaniaNational Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A Erou Iancu Nicolae Street, Voluntari city, Ilfov county, 077190, RomaniaNational Institute for Laser, Plasma and Radiation Physics, 409 Atomistilor Street, Magurele city, Ilfov county, 077125, Romania; Faculty of Physics, University of Bucharest, 405 Atomistilor Street, Magurele city, Ilfov county, 077125, RomaniaBulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. The thin films were grown using capacitively coupled plasma enhanced chemical vapor deposition and a technological workflow for the transfer of the active material onto flexible substrates was established in order to use the material as a piezoresitive element. Preliminary electrical measurements under mechanical strain were performed in order to test the piezoresistive response of the material and promising GF values of 50 − 250 at 1% strain were obtained.https://doi.org/10.1515/rams-2020-0031flexible sensorsfilm transfergauge factor
collection DOAJ
language English
format Article
sources DOAJ
author Simionescu Octavian-Gabriel
Pachiu Cristina
Ionescu Octavian
Dumbrăvescu Niculae
Buiu Octavian
Popa Radu Cristian
Avram Andrei
Dinescu Gheorghe
spellingShingle Simionescu Octavian-Gabriel
Pachiu Cristina
Ionescu Octavian
Dumbrăvescu Niculae
Buiu Octavian
Popa Radu Cristian
Avram Andrei
Dinescu Gheorghe
Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
Reviews on Advanced Materials Science
flexible sensors
film transfer
gauge factor
author_facet Simionescu Octavian-Gabriel
Pachiu Cristina
Ionescu Octavian
Dumbrăvescu Niculae
Buiu Octavian
Popa Radu Cristian
Avram Andrei
Dinescu Gheorghe
author_sort Simionescu Octavian-Gabriel
title Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
title_short Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
title_full Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
title_fullStr Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
title_full_unstemmed Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
title_sort nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing
publisher De Gruyter
series Reviews on Advanced Materials Science
issn 1605-8127
publishDate 2020-07-01
description Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. The thin films were grown using capacitively coupled plasma enhanced chemical vapor deposition and a technological workflow for the transfer of the active material onto flexible substrates was established in order to use the material as a piezoresitive element. Preliminary electrical measurements under mechanical strain were performed in order to test the piezoresistive response of the material and promising GF values of 50 − 250 at 1% strain were obtained.
topic flexible sensors
film transfer
gauge factor
url https://doi.org/10.1515/rams-2020-0031
work_keys_str_mv AT simionescuoctaviangabriel nanocrystallinegraphitethinlayersforlowstrainhighsensitivitypiezoresistivesensing
AT pachiucristina nanocrystallinegraphitethinlayersforlowstrainhighsensitivitypiezoresistivesensing
AT ionescuoctavian nanocrystallinegraphitethinlayersforlowstrainhighsensitivitypiezoresistivesensing
AT dumbravescuniculae nanocrystallinegraphitethinlayersforlowstrainhighsensitivitypiezoresistivesensing
AT buiuoctavian nanocrystallinegraphitethinlayersforlowstrainhighsensitivitypiezoresistivesensing
AT poparaducristian nanocrystallinegraphitethinlayersforlowstrainhighsensitivitypiezoresistivesensing
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