Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing

Nanocrystalline graphite thin layers for low-strain, high-sensitivity piezoresistive sensing

Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. The thin films were grown using capacitively coupled plasma enhanced chemical vapor deposition and a technological workflow for the transfer of the active material onto flexible substrates was est...

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Bibliographic Details
Main Authors: Simionescu Octavian-Gabriel, Pachiu Cristina, Ionescu Octavian, Dumbrăvescu Niculae, Buiu Octavian, Popa Radu Cristian, Avram Andrei, Dinescu Gheorghe
Format: Article
Language:English
Published: De Gruyter 2020-07-01
Series:Reviews on Advanced Materials Science
Subjects:
flexible sensors
film transfer
gauge factor
Online Access:https://doi.org/10.1515/rams-2020-0031
Description
Summary:Bulk nanocrystalline graphite has been investigated as a possible candidate for piezoresistive sensors. The thin films were grown using capacitively coupled plasma enhanced chemical vapor deposition and a technological workflow for the transfer of the active material onto flexible substrates was established in order to use the material as a piezoresitive element. Preliminary electrical measurements under mechanical strain were performed in order to test the piezoresistive response of the material and promising GF values of 50 − 250 at 1% strain were obtained.
ISSN:1605-8127

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