THE RAMAN SPECTROSCOPY USE FOR MONITORING OF CHANGES IN THE GLASS STRUCTURE OF THE THIN LAYERS CAUSED BY ION IMPLANTATION
In this paper, we have demonstrated the utility of Raman spectroscopy as a technique for the characterisation of changes in the glass structure of the thin layers caused by ion implantation. Various types of silicate glasses were implanted by Au+ ions with energy of 1.7 MeV and a fluence of 1 x 1016...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
University of Chemistry and Technology, Prague
2015-09-01
|
| Series: | Ceramics-Silikáty |
| Subjects: | |
| Online Access: |
http://www.ceramics-silikaty.cz/2015/pdf/2015_03_187.pdf
|