Metrological studies of the characteristics of multilayer surface coatings using synchrotron radiation

Metrological studies of the characteristics of multilayer surface coatings using synchrotron radiation

The investigations of multilayer surface nanostructures characteristics was performed with synchrotron radiation sources, characterized by an intensive, calculated continuum. It plays an important role in nanoelectronics metrological base. The main research were carried out at electron storage rings...

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Bibliographic Details
Main Authors:	A. S. Sigov, O. A. Minaeva, S. I. Anevsky, A. M. Lebedev, R. V. Minaev
Format:	Article
Language:	Russian
Published:	MIREA - Russian Technological University 2021-03-01
Series:	Российский технологический журнал
Subjects:	: multilayer surface nanostructures synchrotron radiation electron storage rings auv vuv and euv radiometers photodiodes filters and multilayer mirrors spectral irradiance superlattice
Online Access:	https://www.rtj-mirea.ru/jour/article/view/275

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