Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide

Numerical Simulation of Optical Sensing by the Far Field Pattern Radiated by Periodic Grating Strips Over Silica Buffer on the Silicon Wire Waveguide

This paper presents results of numerical modeling of a modified design of an optical sensor based on segmented periodic silicon oxynitride (SiON) grating evanescently coupled with silicon wire. This segmented grating works as a leaky waveguide, which filters input power from a broadband optical sour...

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Bibliographic Details
Main Authors: Andrei Tsarev, Vittorio M. N. Passaro
Format: Article
Language:English
Published: MDPI AG 2020-09-01
Series:Sensors
Subjects:
optical sensors
silicon wire
silicon oxynitride (SiON)
segmented grating
far field pattern
numerical modeling
Online Access:https://www.mdpi.com/1424-8220/20/18/5306

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