Micromachined Silicon Sensors — Measuring up to Pressures of the Aerospace Industry

Micromachined Silicon Sensors — Measuring up to Pressures of the Aerospace Industry

Bibliographic Details
Main Author:	Tony Cuttill
Format:	Article
Language:	English
Published:	SAGE Publishing 2001-06-01
Series:	Measurement + Control
Online Access:	https://doi.org/10.1177/002029400103400501

Similar Items

The Fabrication and Measurment of Silicon Micromachining gas sensor
by: Duann Yuan Chi, et al.
Published: (1994)

Silicon-micromachined flow sensors
by: Jiang, Fukang
Published: (1998)

Micromachined flow sensors for velocity and pressure measurement
by: Song, Chao
Published: (2014)

A silicon micromachined lateral resonant strain gauge pressure sensor
by: Welham, Christopher J.
Published: (1996)

Silicon micromachined sensors and sensor arrays for shear-stress measurements in aerodynamic flows
by: Padmanabhan, Aravind
Published: (2005)

Surface micromachined piezoresistive pressure sensor
by: Chu,Huey-Chi, et al.
Published: (1996)

Micromachined piezoresistive single crystal silicon cantilever sensors
by: Su, Yi
Published: (1997)

Silicon micromachined sensors and actuators for fluid mechanics applications
by: Liu, Chang
Published: (1996)

Design, Development and Performance Analysis of Micromachined Sensors for Pressure and Flow Measurement
by: Singh, Jaspreet
Published: (2018)

Micromachined in-plane acoustic pressure gradient sensors
by: Kuntzman, Michael Louis
Published: (2015)

Integrated design for an optically driven micromachined silicon pressure transducer
by: Vincent, David Robert
Published: (1993)

Novel Pressure Sensor for Aerospace Purposes
by: T. BEUTEL, et al.
Published: (2010-04-01)

The design and fabrication of micromachined capacitive micro sensors for pressure measurement and tactile imaging
by: George, Gegi
Published: (1994)

Design and Fabrication of Micromachined Absolute Micro Pressure Sensor
by: P. A. Alvi, et al.
Published: (2008-09-01)

Design and Fabrication of Bulk Micromachined Piezoresistive Pressure Sensor
by: Yu-Ren Lin, et al.
Published: (2009)

A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure
by: Sen Ren, et al.
Published: (2013-12-01)

Silicon micromachining technique and applications
by: 翁炳國
Published: (1992)

Anisotropic etching for silicon micromachining
by: Hobbs, Neil Townsend
Published: (2014)

Micro-Raman measurement of bending stresses in micromachined silicon flexures
by: Srikar, V.T, et al.
Published: (2003)

A Micromachined Piezoresistive Pressure Sensor with a Shield Layer
by: Gang Cao, et al.
Published: (2016-08-01)

Wireless micromachined ceramic pressure sensors for high termperature environments
by: English, Jennifer M.
Published: (2007)

Robust micromachined capacitive pressure sensors for mechanically harsh environments
by: Chang, Sung Pil
Published: (2007)

Laser Micromachining of Glass, Silicon, and Ceramics
by: L. Rihakova, et al.
Published: (2015-01-01)

Silicon micromachined wafer-bonded valves
by: Huff, Michael Allan
Published: (2007)

MEMS design : the geometry of silicon micromachining
by: Hubbard, Ted J.
Published: (1994)

The application of silicon micromachined structures to haemocytometry
by: Tracey, Mark
Published: (1994)

Electrochemical behaviour of silicon for micromachining applications
by: Ozdemir, C. Hakan
Published: (1992)

Lubrication of high sliding silicon micromachines
by: Ku, Ingrid Siu Ying
Published: (2010)

RVSM Compliant Air Data Testing Verifies Measurement of the Critical Reduced Vertical Separation between In-Flight Aircraft
by: Tony Cuttill MInstMC
Published: (2003-10-01)

Sensitivity-Compensated Micro-Pressure Flexible Sensor for Aerospace Vehicle
by: Xiaozhou Lü, et al.
Published: (2018-12-01)

Research on Symmetry of Micromachined Silicon Resonant Accelerometer
by: Haipeng Guo, et al.
Published: (2016-10-01)

Novel etch-stop materials for silicon micromachining
by: Wu, Kenneth Chu-Chao
Published: (2005)

Electrochemical and photoelectrochemical micromachining of silicon in HF electroytes
by: Mlcak, Richard
Published: (2007)

Silicon micromachining for micro-optical device manufacture
by: Bostock, R. M.
Published: (1998)

Measurement of the mass flow and tangential momentum accomodation coefficient in silicon micromachined channels
by: Arkilic, Errol B. (Errol Bernard)
Published: (2005)

Micromachined Fluid Inertial Sensors
by: Shiqiang Liu, et al.
Published: (2017-02-01)

A micromachined silicon vibrating-beam angular rate sensor : a design and implementation study
by: Nikpour, Behrouz
Published: (1998)

Tools to measure the technological capabilities of the aerospace industry
by: Acela Castillón-Barraza, et al.
Published: (2018-11-01)

Micromachined capacitive silicon bulk acoustic wave gyroscopes
by: Johari, Houri
Published: (2010)

The Hybrid Micromachined Silicon-Optical-Bench and Its Applications
by: Hung-Yi Lin, et al.
Published: (2002)

Cannot write session to /tmp/vufind_sessions/sess_44h749gmghgap4oj5rli0ngnpj