Micromachined Silicon Sensors — Measuring up to Pressures of the Aerospace Industry
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2001-06-01
|
| Series: | Measurement + Control |
| Online Access: | https://doi.org/10.1177/002029400103400501 |