MEMS-based Pt-PtRh film temperature sensor on alumina substrate
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2016-03-01
|
| Series: | The Journal of Engineering |
| Online Access: | http://digital-library.theiet.org/content/journals/10.1049/joe.2016.0022 |
| id |
doaj-19bacf451bf54bea90499dbca9eb9fcf |
|---|---|
| record_format |
Article |
| spelling |
doaj-19bacf451bf54bea90499dbca9eb9fcf2021-04-02T16:57:47ZengWileyThe Journal of Engineering2051-33052016-03-0110.1049/joe.2016.0022JOE.2016.0022MEMS-based Pt-PtRh film temperature sensor on alumina substrateJiubin ZhangPing ChengCongchun ZhangGuifu DingFranklin DuanJing ShaoQiang Wanghttp://digital-library.theiet.org/content/journals/10.1049/joe.2016.0022 |
| collection |
DOAJ |
| language |
English |
| format |
Article |
| sources |
DOAJ |
| author |
Jiubin Zhang Ping Cheng Congchun Zhang Guifu Ding Franklin Duan Jing Shao Qiang Wang |
| spellingShingle |
Jiubin Zhang Ping Cheng Congchun Zhang Guifu Ding Franklin Duan Jing Shao Qiang Wang MEMS-based Pt-PtRh film temperature sensor on alumina substrate The Journal of Engineering |
| author_facet |
Jiubin Zhang Ping Cheng Congchun Zhang Guifu Ding Franklin Duan Jing Shao Qiang Wang |
| author_sort |
Jiubin Zhang |
| title |
MEMS-based Pt-PtRh film temperature sensor on alumina substrate |
| title_short |
MEMS-based Pt-PtRh film temperature sensor on alumina substrate |
| title_full |
MEMS-based Pt-PtRh film temperature sensor on alumina substrate |
| title_fullStr |
MEMS-based Pt-PtRh film temperature sensor on alumina substrate |
| title_full_unstemmed |
MEMS-based Pt-PtRh film temperature sensor on alumina substrate |
| title_sort |
mems-based pt-ptrh film temperature sensor on alumina substrate |
| publisher |
Wiley |
| series |
The Journal of Engineering |
| issn |
2051-3305 |
| publishDate |
2016-03-01 |
| url |
http://digital-library.theiet.org/content/journals/10.1049/joe.2016.0022 |
| work_keys_str_mv |
AT jiubinzhang memsbasedptptrhfilmtemperaturesensoronaluminasubstrate AT pingcheng memsbasedptptrhfilmtemperaturesensoronaluminasubstrate AT congchunzhang memsbasedptptrhfilmtemperaturesensoronaluminasubstrate AT guifuding memsbasedptptrhfilmtemperaturesensoronaluminasubstrate AT franklinduan memsbasedptptrhfilmtemperaturesensoronaluminasubstrate AT jingshao memsbasedptptrhfilmtemperaturesensoronaluminasubstrate AT qiangwang memsbasedptptrhfilmtemperaturesensoronaluminasubstrate |
| _version_ |
1721554878408425472 |