MEMS-based Pt-PtRh film temperature sensor on alumina substrate
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2016-03-01
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| Series: | The Journal of Engineering |
| Online Access: | http://digital-library.theiet.org/content/journals/10.1049/joe.2016.0022 |