Superhard Boron-Rich Boron Carbide with Controlled Degree of Crystallinity

Superhard boron-rich boron carbide coatings were deposited on silicon substrates by microwave plasma chemical vapor deposition (MPCVD) under controlled conditions, which led to either a disordered or crystalline structure, as measured by X-ray diffraction. The control of either disordered or crystal...

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Bibliographic Details
Main Authors: Kallol Chakrabarty, Wei-Chih Chen, Paul A. Baker, Vineeth M. Vijayan, Cheng-Chien Chen, Shane A. Catledge
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/13/16/3622