Capacitive Accelerometers with Beams Based on Alternated Segments of Different Widths

Capacitive Accelerometers with Beams Based on Alternated Segments of Different Widths

Microelectromechanical (MEM) Accelerometers measure the accelerations or vibrations experienced by objects due to inertial forces or mechanical excitations. To improve their proof mass displacement, several alternatives have been used, such as the design of different shapes of suspension beams. In t...

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Bibliographic Details
Main Authors: Margarita Tecpoyotl-Torres, Pedro Vargas-Chable, Josue Osvaldo Sandoval-Reyes, Sahiril Fernanda Rodriguez-Fuentes, Ramon Cabello-Ruiz
Format: Article
Language:English
Published: MDPI AG 2020-10-01
Series:Actuators
Subjects:
ANSYS
cantilever
displacement modeling
harmonic analysis
explicit dynamic analysis
silicon
Online Access:https://www.mdpi.com/2076-0825/9/4/97

Internet

https://www.mdpi.com/2076-0825/9/4/97

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